Temperature Environmental Test Chambers

Product Details:

For production lines processes:

• The Large Capacity Temperature Chamber is suitable for drying, baking or anneal treatment processes. 
• Both forced hot air circulation and ventilation system can be selected by damper switching.

Product Details:

In recent years, wiring material has been changing from aluminum to copper with low resistivity. Accordingly, when heat processed in a normal chamber, copper parts oxidize, leading to flaws. In addition, aging at 250°C is performed to inspect whether the written data on flash memory is deleted with electromigration, and bump parts oxide, so the oxygen concentration must be lowered to less than 100 ppm. This Anaerobic Oven was developed to meet these demands. Aging tests at 350°C can be performed with an oxygen concentration of 100 ppm or less.

Product Details:

Worldwide applications:

• ESPEC's Temperature Chambers are suitable for a broad range of applications from high-temperature testing, to heat treatment or drying for production lines.
• Several volumes are available in horizontal (PH series) or vertical (PV series) models.

High performance chamber:

• A temperature-indication controller with an advanced PID operation, and an originally developed chamber configuration provide unmatched oven performance. 
• Temperature uniformity, temperature constancy, temperature heat-up rate, and temperature recovery time are performed with the upmost reliability.

Wide model selection (PH series):

• We provide a total of 16 ovens with combination of temperature range, capacity, and instrumentation.

A space-saving upright chamber (PV series):

• Components are incorporated into the top portion of the vertical chamber, reducing installation space by 20 to 60% (comparison with conventional model). 
• Increases productivity on the production line, and saves laboratory space.

Product Details:

2 models available depending on applications: up to +500°C for high temperature life tests or heat resistance tests; up to +700°C for ceramics baking process, or heat resistance tests for highly functional glass and hybrid polymer materials. The +700°C-type features ceramic fiber and aluminum foil for heat insulation. Various safety mechanisms and protection devices are equipped as standard.

Product Details:

This industrial oven is suitable for heat-treatment or drying process of synthetic resins or volatile solvent. Safety features such as the explosion vent or the door lock system (single-action lever) allows operation in total safety.

Product Details:

Testing under low oxygen condition:

• Chamber is equipped with a non-oxidizing gas intake structure that fills the chamber up with gases such as CO2 or N2. 
• Suitable for heat treatment or temperature characteristics testing under low oxygen concentration atmosphere.

Product Details:

High performances in a compact design:

• Ideal for drying or heat-treatment processes, the desk-top High Temperature Chamber covers a wide range of applications.

Product Details:

The sirocco fan smoothly circulates the heated air inside this hot air circulation oven. In addition to easy temperature set-up through key input, this oven features improved usability and safety with the upper limit temperature alarm function.

Product Details:

ISO Class 5 clean oven:

• Thanks to HEPA filters, and an horizontal laminar circulation system, baking, heat treatment or drying of components requiring clean air conditions can be conducting in our High Performance Clean Oven.
• The PVHC model provides stable performance even during heat up or pull down.

Zero contamination test area:

• All internal joints are welded to ensure an airtight structure, and prevents insulation materials' leak from joints.

Instrumentation according to applications:

• Standard instrumentation or M-instrumentation available, from simple heat-treatment application to more elaborated temperature-characteristics testing.

Product Details:

Previously, when workpieces were passed from the preceding process, they were pooled until a batch was ready for processing. This slide tray oven enables heat treatment of workpieces as they come, on each slide tray, sending workpieces to the next process with minimal lost time. Additionally, this model can perform heat treatment for small-volume workpieces for the necessary time on each tray, which also minimizes the drop in temperature when door is opened as well as allowing faster recovery of the processing temperature, both of which contributes to better utilization rate in the heat treatment process.

Product Details:

These models are used extensively in heat treatment/drying or burn-in of semiconductor wafers, liquid crystals, disks and other components and devices requiring clean air conditions. These units can also be prepared for installation in clean-room environments. Class 100 cleanliness is achieved by employing a HEPA filter and a back-to-front laminar circulation system. The high-performance models (with MS suffix) provides stable performance even during heat-up or cooling.

Product Details:

• Exclusive ESPEC controller with large LED display
• Two-step programmability with functions for automatic start, stop, ramp, and repeat
• Visual and audible alarm with diagnostic fault code
• Specimen power supply control terminal: turns specimen off if chamber faults
• Four-tiered safety system for overheat conditions
• Two shelves included standard, rated for 40 lbs. or more
• Exhaust damper for ventilating oven and fast cool-down
• Large variety of models and optional features
• See additional model variations available in the right-hand column

Model types:

• Horizontal-type: Controller and blower to the right of the chamber
• Vertical-type: Controller and blower at the top of the chamber (air distributed horizontally from back wall)

Product Details:

Miniaturization of electronic components has increased the demand for clean heat treatment environments. To give an example, while dust was not previously a problem, it has recently begun to significantly affect the reliability of miniaturized electronic components. In the production of semiconductors, even jigs used in the production process are subject to cleanliness requirements. ESPEC's Large Clean Oven is the answer to these requirements. Not only can it heat-treat mass amounts of specimens at once, it also conforms to the increasing requirements of "heat treatment in a clean environment." Large capacity clean ovens are also in demand due to the necessity of reducing semiconductor manufacturing costs. For example, increasing the wafer size to 300 mm from 200 mm makes the surface area 2.25 times larger, which produces almost twice as many chips. The annealing time is the same regardless of size, so the production volume will double?this can only be accomplished with a large-sized oven.

Supporting large-volume and large-sized specimens:

• In order to support mass heat treatment of specimens, as well as drying and annealing of wafer jigs, quartz tubes, and other items that are getting larger, the inside dimensions have been expanded for this model. 
• The upright configuration takes up the minimum necessary installation space.

Cleanliness Class 5 (Equivalent to FED-STD-209D class 100) / Uniform heat treatment:

• This oven adopts a HEPA filter to attain Cleanliness Class 5 (equivalent to FED-STD-209D class 100). The front flow air circulation system enables uniform circulation of heated air, which contributes to increased production yield. (See figure on right)

Operation in a clean room (optional):

• Hot air in the test area can be exhausted from the hot air exhaust port and the dust generated in the oven machine compartment can be vented from the general exhaust port by connecting an exhaust duct (exhaust duct must be provided by the customer). 
• This prevents dust from spreading and scattering.