Clean Oven

Product Details:

This chamber enables dehydrogenation annealing in low-temperature polysilicon TFT fabrication, activation annealing after ion doping, high oxygen annealing in oxide semiconductor TFT fabrication, polyimide film formation for flexible display devices, semiconductor passivation film curing, and other low and high oxygen heat treatment. The highly efficient air conditioning system ensures high temperature uniformity performance, and a significant improvement in increase and decrease characteristics has enhanced processing capacity.

Product Details:

• Class 4 cleanness (equivalent to Class 10 of FED-STD-209E) even during temperature fluctuations. 
• Oxygen concentration of less than 60% at 10 ppm or less at temperature increase, decrease, and stable levels. Performs heat processing from extremely low oxygen environments to high oxygen environments. (High oxygen support is optional)
• Slim design with a 50% smaller installation space. (Compared to conventional model)
• 50% decrease in system power capacity. (Compared to conventional model)
• High performance temperature and oxygen concentration control system enables setting of the temperature, time, and concentration for each step.
• Special sealing technology enables processing while controlling the consumption of gas uses.
• Efficiently develop processes with the monitoring and data logging functions for the temperature setting, current temperature, oxygen concentration setting, current oxygen concentration, test area pressure, gas flow rate. 
• All data can be output to a USB flash drive as a CSV file

Product Details:

This special clean oven is used for baking after resist coating in the LCD and OLED production process, conductor film annealing, the color filter post-bake process, and other in-line heat treatment processes. It can be deployed from first-generation glass substrates to 10th-generation devices. It achieves more uniform heat processing and lower particles. The use of large glass reduces the installation area of the chamber and contributes to effective use of valuable cleanroom space.

Product Details:

• The gondola zone drive in the test area enables multi-level storage of glass with smaller space.
• High temperature uniformity performance is ensured with the use of a two-layer internal chamber structure and horizontal return duct system.
• Special heat-resistant filter keeps particles low.
• Transport robot, cooling parts, loader and unloader have been modularized.
• Various options are available according to application.
• Supports outer gas and sublimation processing.
• Supports nitrogen gas introduction. 
• For products that support a low-oxygen concentrations, see "Anaerobic Clean Oven (SCO Series)"